JPH0230608B2 - - Google Patents
Info
- Publication number
- JPH0230608B2 JPH0230608B2 JP58127037A JP12703783A JPH0230608B2 JP H0230608 B2 JPH0230608 B2 JP H0230608B2 JP 58127037 A JP58127037 A JP 58127037A JP 12703783 A JP12703783 A JP 12703783A JP H0230608 B2 JPH0230608 B2 JP H0230608B2
- Authority
- JP
- Japan
- Prior art keywords
- rod
- piezoelectric material
- piezoelectric element
- width
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 69
- 239000013078 crystal Substances 0.000 claims description 17
- 238000005452 bending Methods 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 230000001902 propagating effect Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 4
- 238000013016 damping Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000007567 mass-production technique Methods 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02062—Details relating to the vibration mode
- H03H9/0207—Details relating to the vibration mode the vibration mode being harmonic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB8220703 | 1982-07-16 | ||
| GB08220703A GB2124021A (en) | 1982-07-16 | 1982-07-16 | Piezo-electric resonator or filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5923908A JPS5923908A (ja) | 1984-02-07 |
| JPH0230608B2 true JPH0230608B2 (en]) | 1990-07-09 |
Family
ID=10531730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58127037A Granted JPS5923908A (ja) | 1982-07-16 | 1983-07-14 | 圧電素子 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4583063A (en]) |
| EP (1) | EP0099604B1 (en]) |
| JP (1) | JPS5923908A (en]) |
| DE (1) | DE3378345D1 (en]) |
| GB (1) | GB2124021A (en]) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2557732B1 (fr) * | 1983-12-28 | 1986-04-11 | Lefevre Rene | Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede |
| CH655224GA3 (en]) * | 1984-04-06 | 1986-04-15 | ||
| US5135312A (en) * | 1990-07-20 | 1992-08-04 | Sundstrand Data Control, Inc. | Temperature transducer |
| US5396144A (en) * | 1993-08-02 | 1995-03-07 | New S.D., Inc. | Rotation rate sensor with center mounted tuning fork |
| DE19837764C1 (de) * | 1998-08-20 | 2000-03-16 | Lohmann Therapie Syst Lts | Verfahren zum Herstellen von klebenden Stanzlingen aus einer endlosen Bahn und nach dem Verfahren hergestellter Stanzling |
| RU2187882C1 (ru) * | 2000-12-22 | 2002-08-20 | ФГУП "Научно-испытательный институт химических и строительных машин" | Вибратор крутильных колебаний |
| US6624726B2 (en) * | 2001-08-31 | 2003-09-23 | Motorola, Inc. | High Q factor MEMS resonators |
| CN113364423B (zh) * | 2021-05-27 | 2023-11-10 | 广州乐仪投资有限公司 | 压电mems谐振器及其形成方法、电子设备 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1264635B (de) * | 1962-02-09 | 1968-03-28 | Siemens Ag | Elektromechanisches Filter |
| US3143672A (en) * | 1962-09-14 | 1964-08-04 | Bell Telephone Labor Inc | Single crystal quartz filter elements, oscillators and transducers |
| US3646413A (en) * | 1970-09-25 | 1972-02-29 | Avco Corp | Piezoelectric-driven variable capacitor |
| US3763446A (en) * | 1972-03-31 | 1973-10-02 | Murata Manufacturing Co | High frequency multi-resonator of trapped energy type |
| US4071797A (en) * | 1976-01-20 | 1978-01-31 | Societe Suisse Pour L'industrie Horlogere Management Services S.A. | Quartz piezo-electric element vibrating in a coupled mode |
| US4076987A (en) * | 1976-12-10 | 1978-02-28 | Societe Suisse Pour L'industrie Horlogere Management Services S.A. | Multiple resonator or filter vibrating in a coupled mode |
| FR2441960A1 (fr) * | 1978-11-16 | 1980-06-13 | Suisse Horlogerie | Resonateur piezoelectrique travaillant en cisaillement d'epaisseur |
-
1982
- 1982-07-16 GB GB08220703A patent/GB2124021A/en not_active Withdrawn
-
1983
- 1983-06-20 US US06/505,603 patent/US4583063A/en not_active Expired - Fee Related
- 1983-07-08 EP EP83201021A patent/EP0099604B1/en not_active Expired
- 1983-07-08 DE DE8383201021T patent/DE3378345D1/de not_active Expired
- 1983-07-14 JP JP58127037A patent/JPS5923908A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3378345D1 (en) | 1988-12-01 |
| GB2124021A (en) | 1984-02-08 |
| EP0099604A2 (en) | 1984-02-01 |
| US4583063A (en) | 1986-04-15 |
| JPS5923908A (ja) | 1984-02-07 |
| EP0099604A3 (en) | 1985-12-04 |
| EP0099604B1 (en) | 1988-10-26 |
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